Application Case of SVG in Power Harmonic Control of Semiconductor a FAB Factory

1. Background

As a core field of precision manufacturing, semiconductor FAB factories are equipped with a large number of non-linear power loads such as exposure machines, etching machines, ion implanters, UPS uninterruptible power supplies, and precision precision air conditioners. During operation, these equipment will cause serious power quality problems such as high-order power harmonics, reactive power fluctuations, and three-phase voltage imbalance, which directly affect the precision and production stability of wafer manufacturing processes. The application of Static Var Generator (SVG) in power harmonic control of semiconductor FAB factories needs to realize layered and partitioned deployment combined with the high-voltage power distribution system in the plant area, low-voltage power distribution nodes of clean workshops and power supply circuits of precision equipment. Install large-capacity SVG hosts on the 10kV/35kV high-voltage busbars in the plant area, and distributed SVG devices in low-voltage power distribution rooms and special power distribution cabinets for precision process equipment. Relying on fully-controlled IGBT power modules and real-time power grid detection technology, it instantly collects parameters of power grid voltage, current and harmonic components, and actively generates compensation current with the same amplitude and opposite phase as the harmonic current, quickly offsetting the 3rd, 5th, 7th, 11th and other high-order harmonics generated by various non-linear loads. At the same time, it dynamically compensates reactive power and adjusts three-phase voltage balance, fully adapting to the power supply demand of 24-hour continuous production and instantaneous load power fluctuation in wafer factories. It can be integrated into the existing power distribution system without production shutdown and reconstruction, realizing full-time precise power quality management and control.

2. SVG solutions for Semiconductor fabs

The implementation of SVG completely solves various potential risks caused by power harmonics in semiconductor FAB factories. Firstly, it effectively suppresses the total harmonic distortion rate of the power grid, controls the harmonic content within the strict power quality standards of the semiconductor industry, avoids the misalignment of control modules of precision process equipment and interference of sensor signals caused by harmonics, and eliminates production losses such as wafer scrap and process parameter deviation. Secondly, it stabilizes the amplitude and frequency of power supply voltage, eliminates voltage flicker and instantaneous drop, ensures the stable operation of key process equipment such as exposure and development, avoids production interruption caused by abnormal power supply, and maintains wafer production yield. Thirdly, it improves the power factor of the power system to above 0.98, reduces reactive loss and line transmission energy consumption, lowers the risk of heating and aging of transformers and cables, prolongs the service life of power equipment, and reduces power fines and operating costs. Fourthly, it puts an end to the maloperation of relay protection devices and deviation of power metering instruments caused by harmonics, avoids the expansion of power distribution system faults, ensures the safe and stable operation of the plant's power supply system, and meets the extremely high requirements of semiconductor production for power supply reliability.

3. SVG benefits and efficiency

In summary, with the advantages of fast response, high compensation accuracy and stable operation, SVG has become the core solution for power harmonic control and power quality optimization in semiconductor FAB factories. It can not only efficiently eliminate harmonic interference and resolve various potential power supply hazards, but also ensure the stable operation of precision process equipment, improve wafer production yield and production efficiency. At the same time, it helps factories achieve energy conservation, consumption reduction and safe production, fully conforming to the core needs of advanced semiconductor manufacturing industry for highly reliable, stable and precise power supply systems, and providing a solid power guarantee for the stable development of semiconductor industry.